Name Materials Characterization Facility (MCF)
Department Chemistry
Room # 110A Building DRTY
Director Crooks, Richard crooks@tamu.edu
Manager Lackowski, William lackowski@tamu.edu
Website http://www.chem.tamu.edu/cims Phone # 979.848.1477
Purpose

The Materials Characterization Facility (MCF) is a multi-user laboratory designed to support the research efforts of the community at Texas A&M University. The MCF houses both fabrication and characterization instrumentation for the rapid prototyping and characterization of lithographically based micro-chemical systems with critical lateral length dimensions on the order of 1 micron or greater. The MCF has been designed to allow users a high degree of accessibility and flexibility not typically found in clean room environments; thereby, making hybrid, multi-material, integrated devices possible.
Equipment

·1 350 sq. ft. Class 1000 Soft-Wall Clean Room (AirCrafters)

·2 Mask Aligner (Quinte Q-4000)

·3 Evaporative Metal Deposition System (BOC Edwards Auto 306)

·4 3-D Optical Microscope (Hirox 3-D scope)

·5 Stylus Profilometer (Dektak III)

·6 Spin Coater (Specialty Coating Systems P6206)

·7 Water Purification System (Millipore Academic)

·8 Imaging X-Ray Photoelectron Spectrometer (Kratos Axis Ultra)

·9 Multi-Mode AFM/STM (Digital Instruments Nanoscope IIIA)

·10 Nano-Indenter with Nano-Newton Force Resolution and AFM Imaging (Hysitron TriboIndenter)

·11 Reactive Ion Etcher-March Plasma System

 

AFM/STM Profilometer 3-D Microscope

 

 

 

Nanoindenter Metal Evaporator Imaging XPS

 

 

 

 

Mask Aligner